| 000 | 00477nam a2200205Ia 4500 | ||
|---|---|---|---|
| 005 | 20250623173838.0 | ||
| 008 | 240220s9999 xx 000 0 und d | ||
| 041 | _aENG | ||
| 082 | _a670.1 | ||
| 100 | _aMadou Marc .J. | ||
| 245 | 0 | _aFundamentals Of Microfabrication And Nanotechnology Vol.2 | |
| 250 | _a3 Ed. | ||
| 260 | _aNew York | ||
| 260 | _bCRC Press | ||
| 260 | _c2012 | ||
| 300 | _a656p. | ||
| 365 | _b4897.2 | ||
| 650 | _aMECHANICAL_DESIGN | ||
| 942 | _cDBK | ||
| 999 |
_c32251 _d32251 |
||