000 00409nam a2200181Ia 4500
008 240220s9999 xx 000 0 und d
041 _aENG
082 _a621.3815
100 _aGhandhi S. K.
245 0 _aVlsi Fabrication Principles.
260 _aNew York
260 _bJohn Wiley And Sons Inc.
260 _c2003
300 _a833p.
365 _b373
650 _aETC_ELECTRONICS
942 _cDBK
999 _c27341
_d27341