000 00433nam a2200181Ia 4500
008 240220s9999 xx 000 0 und d
041 _aENG
082 _a669.5
100 _aWilkening G
245 0 _aNanoscale Calibration Standards And Methods
250 _a1ST Ed.
260 _bWiley Vch Verlag Gmbh And Co Kgaa
260 _c2005
300 _a519p.
365 _b9325.8
650 _aMECHANICAL_DESIGN
942 _cTEQUIP
999 _c2659
_d2659