000 | 00433nam a2200193Ia 4500 | ||
---|---|---|---|
005 | 20250623164748.0 | ||
008 | 240220s9999 xx 000 0 und d | ||
020 | _a9783709107058 | ||
041 | _aENG | ||
100 | _aDirk Ortloff | ||
245 | 0 | _aMEMS Product Engineering | |
260 | _aWiesbaden | ||
260 | _bSpringer | ||
260 | _c2014 | ||
365 | _b301.82 | ||
650 | _aETC_ELECTRONICS | ||
700 | _aThilo Schmidt | ||
942 | _cEB | ||
999 |
_c12184 _d12184 |