000 00433nam a2200193Ia 4500
005 20250623164748.0
008 240220s9999 xx 000 0 und d
020 _a9783709107058
041 _aENG
100 _aDirk Ortloff
245 0 _aMEMS Product Engineering
260 _aWiesbaden
260 _bSpringer
260 _c2014
365 _b301.82
650 _aETC_ELECTRONICS
700 _aThilo Schmidt
942 _cEB
999 _c12184
_d12184