Madou Marc .J. <br/><br/>
Fundamentals Of Microfabrication And Nanotechnology Vol.3 

 - 3 Ed. 
 - New York  CRC Press  2012 
 - 636p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MECHANICAL_DESIGN
<br/><br/><label>Dewey Class. No.: </label>670