Hsu T. R. <br/><br/>
Mems And Micro Systems Design And Manufactures 

 - New Delhi  Tata Mcgraw Hill Education Pvt. Ltd.  2012 
 - 436p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MECHANICAL_DESIGN
<br/><br/><label>Dewey Class. No.: </label>621.381